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Mass flow control device Product List

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High-Temperature MFC "MARU8000HTs"

High-Temperature MFC "MARU8000HTs"

Responding to diverse development and mass production with unique sensor technology! High-temperature MFC supporting temperature control and mass flow control.

This product is a high-temperature mass flow controller (MFC) that enables diverse precursor-specific development and mass production based on unique sensor technology. It adopts a distinctive structure consisting of a control unit (Room Temperature) and a base unit (High Temperature), supporting high-temperature control up to 170°C. Furthermore, we are also developing products that can handle up to 200°C. We contribute to building a product portfolio based on domestic technology, providing total solutions for mass flow control, high-temperature control, and mixed gas control. Additionally, we operate a PLM system for the development and quality management system. 【Features】 ■ Manufactured based on unique sensor technology ■ Supports high temperatures up to 170°C (products for 200°C are also under development) ■ Composed of a control unit and a base unit ■ Capable of diverse precursor-specific development and mass production ■ Provides mass flow control, high-temperature control, and mixed gas control *For more details, please download the PDF or feel free to contact us.

  • Flow Control
  • Mass flow control device

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Leave high differential pressure and large flow rates to Burkert's MFC!

Leave high differential pressure and large flow rates to Burkert's MFC!

The Burkert MFC can handle high differential pressure (2.2 MPa) and high flow rates (2500 lN/min). It is compatible with air and various other gases!

For over 70 years, we have cultivated technology and achievements as a long-established manufacturer of fluid control devices specializing in electromagnetic valves and flow control valves. We realize mass flow control of gases with MFC even under high differential pressure and high flow rates. 【One unit performs multiple roles, reducing total costs!】 ● By accommodating high differential pressure (2.2 MPa), there is no need for pressure-reducing valves or regulators that were previously required. ● By supporting high flow rates (2500 lN/min (N2)), multiple MFCs can be consolidated into one unit. ● Capable of controlling flow rates from low to high (for example, 50 to 2500 lN/min (N2)) with a single unit. ● Models compatible with ammonia are also available. ● Equipped with inline sensors to achieve smooth control even at low differential pressures. ● Complete shut-off is achieved with resin seals and shut-off functions. 【Easy to introduce & ready for immediate use!】 ● Shipped calibrated, so no setup or adjustments are needed for immediate use. ● No dedicated power supply is required (operates on DC24V), making it easy to implement. 【Unique to Bürkert & IoT generation】 ● Compatible with communication methods such as OpenCAN, fieldbus, and RS485. ● Proposals focusing on maintenance and space-saving features are also possible!

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  • Flow Control
  • Mass flow control device

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ACE Fluid Control Equipment Product Digest

ACE Fluid Control Equipment Product Digest

The definitive version of the flow controller. It has a fast response speed to actual flow and is resistant to gas pressure fluctuations.

The definitive version of differential pressure and full flow type flow controllers. It has a fast response speed to actual flow and is resistant to gas pressure fluctuations. The differential pressure mass flow controller AFC/AFM series measures the pressure difference of gas that occurs when flowing through a small laminar flow element, performs temperature and pressure compensation, and measures and controls mass flow. The large flow differential pressure mass flow controller DPFC-250/DPFM measures the pressure difference generated by turbulence, performs temperature and pressure compensation, and converts it to mass flow. Additionally, we offer a variety of products including the large flow (over 1000 NLM) differential pressure mass flow controller DPFC-500/DPFM, automatic pressure controller AP-200 series, and automatic back pressure controllers. For more details, please contact us or refer to the catalog.

  • Flow Control
  • Other process controls
  • Mass flow control device

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